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Proceedings Paper

The dynamic stress in micro-structures studied by Raman spectroscopy
Author(s): Chenyang Xue; Lina Zheng; Jijun Xiong; Wendong Zhang; Shengbo Sang
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Paper Abstract

Stress distribution is one of the main factors influencing the reliability of MEMS (Micro Electro Mechanical System) structure. In most cases, MEMS devices work in motion state, the dynamic stress often affects the performances of the MEMS devices. For the first time, dynamic streses were measured by means of Raman spectroscopy and high-frequency modulation technology, the measurement result shows that dynamic stress at a certain point in silicon micro-resonator is in agreement with the analysis of theory.

Paper Details

Date Published: 10 June 2006
PDF: 7 pages
Proc. SPIE 6344, Advanced Laser Technologies 2005, 63442K (10 June 2006); doi: 10.1117/12.693651
Show Author Affiliations
Chenyang Xue, North Univ. of China (China)
Lina Zheng, North Univ. of China (China)
Jijun Xiong, North Univ. of China (China)
Wendong Zhang, North Univ. of China (China)
Shengbo Sang, North Univ. of China (China)


Published in SPIE Proceedings Vol. 6344:
Advanced Laser Technologies 2005
Ivan A. Shcherbakov; Kexin Xu; Qingyue Wang; Alexander V. Priezzhev; Vladimir I. Pustovoy, Editor(s)

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