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Proceedings Paper

Development of an actinic 193-nm phase metrology tool
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Date Published:
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Proc. SPIE 6349, Photomask Technology 2006, ; doi: 10.1117/12.693326
Show Author Affiliations
Andrew J. Merriam, Actinix (United States)
James J. Jacob, Actinix (United States)


Published in SPIE Proceedings Vol. 6349:
Photomask Technology 2006
Patrick M. Martin; Robert J. Naber, Editor(s)

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