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Proceedings Paper

Determination of subsurface structure parameters of a sample using secondary electrons energy spectrums
Author(s): S. S. Borisov; S. I. Zaitsev; A. Bloshenko; T. Misutina
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Paper Abstract

Using developed simulalion program based on Monte-Carlo method in discrete looses approximation (DLA) we carried out analysis of secondary electrons (SE) energy spectrums (ES). The possibility of determination of thickness and depth of subsurface structures using ES of SE is shown.

Paper Details

Date Published: 31 May 2006
PDF: 3 pages
Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 62780L (31 May 2006); doi: 10.1117/12.693212
Show Author Affiliations
S. S. Borisov, M.V. Lomonosov Moscow State Univ. (Russia)
S. I. Zaitsev, Institute of Problems of Microelectronic Technology (Russia)
A. Bloshenko, M.V. Lomonosov Moscow State Univ. (Russia)
T. Misutina, M.V. Lomonosov Moscow State Univ. (Russia)


Published in SPIE Proceedings Vol. 6278:
Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics
Anatoly M. Filachev, Editor(s)

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