Share Email Print
cover

Proceedings Paper

Computation of charge and energy deposited during electron beam irradiation depth distributions in discrete looses approximation
Author(s): S. S. Borisov; S. I. Zaitsev; E. A. Grachev
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Problems of simulation of deposited during beam irradiation charge and energy (dose) simulation. Results obtained using Monte-Carlo method in discrete and continuous looses. Analytical approximations for depth-dose and charge-dose for Si, Au, Ag, Cu, GaN obtained.

Paper Details

Date Published: 31 May 2006
PDF: 4 pages
Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 62780K (31 May 2006); doi: 10.1117/12.693211
Show Author Affiliations
S. S. Borisov, M.V. Lomonosov Moscow State Univ. (Russia)
S. I. Zaitsev, Institute of Problems of Microelectronic Technology (Russia)
E. A. Grachev, M.V. Lomonosov Moscow State Univ. (Russia)


Published in SPIE Proceedings Vol. 6278:
Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics
Anatoly M. Filachev, Editor(s)

© SPIE. Terms of Use
Back to Top