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Proceedings Paper

One particularity of energy-angular secondary electrons spectrum
Author(s): S. S. Borisov; S. I. Zaitsev
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Paper Abstract

In this work we discuss the problems of the energy-angular spectrum of backscattered and true secondary electrons simulation using the discrete (DLA) and the continuous (CLA) loss approximations. The presence of an angular spectrum artefact - the deviation from the sinusoidal distribution over the range of 177-18O° from the beam direction is shown.

Paper Details

Date Published: 31 May 2006
PDF: 3 pages
Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 62780J (31 May 2006); doi: 10.1117/12.693210
Show Author Affiliations
S. S. Borisov, M.V. Lomonosov Moscow State Univ. (Russia)
S. I. Zaitsev, Institute of Problems of Microelectronic Technology (Russia)


Published in SPIE Proceedings Vol. 6278:
Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics
Anatoly M. Filachev, Editor(s)

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