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Proceedings Paper

Simulation of electron scattering in thin films using Monte-Carlo method in discrete looses approximation
Author(s): S. S. Borisov; S. I. Zaitsev; E. A. Grachev; N. Ivanov
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Paper Abstract

Problems of secondary electrons (SE) energy spectrum simulation are discussed in present article. It is shown that secondary electrons shoot energy spectrum (ES) simulated using discrete looses approximation coincides with Landau distribution function.

Paper Details

Date Published: 31 May 2006
PDF: 4 pages
Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 62780I (31 May 2006); doi: 10.1117/12.693208
Show Author Affiliations
S. S. Borisov, M.V. Lomonosov Moscow State Univ. (Russia)
S. I. Zaitsev, Institute of Problems of Microelectronic Technology (Russia)
E. A. Grachev, M.V. Lomonosov Moscow State Univ. (Russia)
N. Ivanov, M.V. Lomonosov Moscow State Univ. (Russia)


Published in SPIE Proceedings Vol. 6278:
Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics
Anatoly M. Filachev, Editor(s)

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