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Proceedings Paper

Possibility and example of the axial aberrations correction in the combined axially symmetric electromagnetic mirror
Author(s): Valery A. Zhukov; Anna V. Zavyalova
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Paper Abstract

It is offered, designed and digitally simulated new electron - optical element - combined axially symmetric electromagnetic mirror. It is shown, that coefficients of chromatic and spherical aberrations of this mirror have the sign opposite to a usual sign of axial aberrations in axially symmetric optics of charged particles. Their absolute sizes are equal to the double size of a projection of a paraxial optical way of the charged particle in electromagnetic field of a mirror to an axis of symmetry of a mirror. It allows to change the negative coefficients of axial aberrations in a wide range from several millimeters up to meter, without changing of a mirror focus and energy of the charged particles. It allows in turn to compensate the positive coefficients values of axial aberrations of the modern optimized ion and electron objectives. We propose in this paper the method and the electron - optical scheme of full correction of the chromatic and spherical aberrations coefficients in the axially symmetric ion and electron objectives, based on these properties of the mirror. The proposed electron - optical scheme of the corrector has approximately in 5 times less adjusting (mechanical plus electric) degrees of freedom and, hence, it is much more stable than the unique scheme of the corrector working in electron optics. It is shown that the combined electromagnetic mirror, on the contrary of the existing scheme, can be applied not only in electron but also in ion optics.

Paper Details

Date Published: 31 May 2006
PDF: 12 pages
Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 627808 (31 May 2006); doi: 10.1117/12.693194
Show Author Affiliations
Valery A. Zhukov, Institute for Informatics and Automation (Russia)
Anna V. Zavyalova, S.I. Vavilov State Optical Institute (Russia)

Published in SPIE Proceedings Vol. 6278:
Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics
Anatoly M. Filachev, Editor(s)

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