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Proceedings Paper

Automated control of technological parameters of vacuum equipment to guarantee unbreakable quality check
Author(s): A. N. Kozlov; D. Greenfield; A. V. Scherbakov; A. M. Filachev
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Paper Abstract

Discussed are the principles of building automatic control systems for electron- and ion-beam technological equipment. It is shown that such systems must provide unbreakable control of the technological processes, failure-safe evacuation and quality control.

Paper Details

Date Published: 31 May 2006
PDF: 7 pages
Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 62780C (31 May 2006); doi: 10.1117/12.693193
Show Author Affiliations
A. N. Kozlov, RD&P Ctr. ORION (Russia)
D. Greenfield, RD&P Ctr. ORION (Russia)
A. V. Scherbakov, RD&P Ctr. ORION (Russia)
A. M. Filachev, RD&P Ctr. ORION (Russia)


Published in SPIE Proceedings Vol. 6278:
Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics
Anatoly M. Filachev, Editor(s)

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