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Proceedings Paper

Design of cold-cathode ion sources for precise electron-beam processing of the semiconductor structures
Author(s): A. N. Kozlov; A. I. Zaitsev; A. E. Danilovskiy; A. M. Filachev
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Paper Abstract

The grounds to choose the construction of the cold-cathode ion-sources for microphotoelectronic production are presented.

Paper Details

Date Published: 31 May 2006
PDF: 4 pages
Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 62780B (31 May 2006); doi: 10.1117/12.693191
Show Author Affiliations
A. N. Kozlov, RD&P Ctr. ORION (Russia)
A. I. Zaitsev, RD&P Ctr. ORION (Russia)
A. E. Danilovskiy, RD&P Ctr. ORION (Russia)
A. M. Filachev, RD&P Ctr. ORION (Russia)


Published in SPIE Proceedings Vol. 6278:
Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics
Anatoly M. Filachev, Editor(s)

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