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Proceedings Paper

A simple technique for defining the structure and the dimensional parameters of layered specimens
Author(s): N. Dreomova
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Paper Abstract

Scanning electron microscope, equipped with EDAX module, can be used as an analytical device for studying the microelectronic structures, among which the multilayered objects represent a large part of the specimens under study. Three types of signals are registered with this method - secondary electrons (SE), hackscattered electrons (BSE) and x-ray radiation yield (X-ray) - providing the useful information about a specimen tested.

Paper Details

Date Published: 31 May 2006
PDF: 4 pages
Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 62780P (31 May 2006); doi: 10.1117/12.693190
Show Author Affiliations
N. Dreomova, RD&P Ctr. ORION/State Scientific Ctr. (Russia)


Published in SPIE Proceedings Vol. 6278:
Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics
Anatoly M. Filachev, Editor(s)

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