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Proceedings Paper

Perturbation techniques in the problems of computational charged particle optics
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Paper Abstract

Basing on perturbation technique, discussed are some urgent problems of computational charged particle optics including numerical evaluation of fringe fields and field perturbations caused by small deviation of the shape of electrodes from rotational or planar symmetry as well as aberrational analysis of charged particle beams in the most general tensor form. It is shown that perturbation technique, being combined with other numerical approaches such as the tau- variations method and generalized method of initial parameters variation, proves to be most promising for evaluation of mechanical tolerances and simulation of Coulomb repulsion effects and charged particles scattering upon a fine-structure grid.

Paper Details

Date Published: 31 May 2006
PDF: 15 pages
Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 627804 (31 May 2006); doi: 10.1117/12.693186
Show Author Affiliations
Dmitry Greenfield, RD&P Ctr. ORION (Russia)
Mikhail A. Monastryskiy, A.M. Prokhorov General Physics Institute (Russia)
Victor A. Tarasov, A.M. Prokhorov General Physics Institute (Russia)


Published in SPIE Proceedings Vol. 6278:
Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics
Anatoly M. Filachev, Editor(s)

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