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Proceedings Paper

Lateral resolution limit of the laser-scanning confocal vibrometer microscope
Author(s): Christian Rembe
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Paper Abstract

The laser-scanning confocal vibrometer microscope (CVM) for vibration measurements in microscopic structures can map out-of-plane vibrations with picometer amplitude resolution while the locus transverse and depth resolutions are in the sub-micrometer regime. This performance has been achieved by using the measurement beam of a heterodyne laser-Doppler vibrometer (LDV) as the scanned laser beam of a confocal microscope. The power of the heterodyne carrier is a measurement of the detected light intensity. Therefore, the CVM can also be used as common confocal microscope to image and measure geometries of three-dimensional structures. In this paper the general lateral resolution limits of this new microscope type are discussed and the lateral-resolution performance of a realized system is demonstrated. This system is optimized to measure out-of-plane vibrations in microelectromechanical systems (MEMS).

Paper Details

Date Published: 21 June 2006
PDF: 12 pages
Proc. SPIE 6345, Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 63451E (21 June 2006); doi: 10.1117/12.693073
Show Author Affiliations
Christian Rembe, Polytec GmbH (Germany)


Published in SPIE Proceedings Vol. 6345:
Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications
Enrico Primo Tomasini, Editor(s)

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