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Proceedings Paper

In-plane vibration measurement of microdevices by the knife-edge technique in reflection mode
Author(s): Alain Bosseboeuf; Cedric Bréluzeau; Fabien Parrain; Philippe Coste; Jean-Paul Gilles; Souhil Megherbi; Xavier Le Roux
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Paper Abstract

The knife-edge technique in reflection mode is an alternative method for the characterization of in-plane motion and vibrations of microdevices. In this paper, we investigate this technique for sinusoidal vibration measurements of microresonators. First, we examine theoretically the effect of light reflection on the non moving substrate. It is shown that it has a significant effect on the sensitivity of the knife-edge technique to in-plane vibrations and that it introduces a slight sensitivity to out-of-plane vibrations. Then we demonstrate in-plane resonance measurements with a resolution in the nanometer range in the unfavourable case of a polysilicon resonator on a polysilicon coated substrate. Finally advantages, limitations and calibration issues of this technique are discussed.

Paper Details

Date Published: 21 June 2006
PDF: 8 pages
Proc. SPIE 6345, Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 63451D (21 June 2006); doi: 10.1117/12.693067
Show Author Affiliations
Alain Bosseboeuf, Institut d'Electronique Fondamentale, CNRS, Univ. Paris Sud XI (France)
Cedric Bréluzeau, Institut d'Electronique Fondamentale, CNRS, Univ. Paris Sud XI (France)
Fabien Parrain, Institut d'Electronique Fondamentale, CNRS, Univ. Paris Sud XI (France)
Philippe Coste, Institut d'Electronique Fondamentale, CNRS, Univ. Paris Sud XI (France)
Jean-Paul Gilles, Institut d'Electronique Fondamentale, CNRS, Univ. Paris Sud XI (France)
Souhil Megherbi, Institut d'Electronique Fondamentale, CNRS, Univ. Paris Sud XI (France)
Xavier Le Roux, Institut d'Electronique Fondamentale, CNRS, Univ. Paris Sud XI (France)


Published in SPIE Proceedings Vol. 6345:
Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications
Enrico Primo Tomasini, Editor(s)

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