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Proceedings Paper

Glancing angle deposited thin films and their applications in laser systems
Author(s): Jianda Shao; Sumei Wang; Zicai Shen; Xiaoyong Fu; Hongbo He; Zhengxiu Fan
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Paper Abstract

Glancing angle deposition (GLAD) is a novel way to produce nanostructural thin films with engineered porosity, and it is possible to make new optical components in laser systems. In this paper, ZrO2, SiO2 and TiO2 thin films were grown by electron beam evaporation with GLAD technique. Different microstructures were observed. The optical properties, such as transmittance and refractive index were characterized. As application of the GLAD thin films, several optical components were designed and fabricated, such as graded-index rugate filter, broadband antireflection coating and phase retardater for visible and near infrared laser systems. Finally, laser-induced damage threshold were measured and discussed.

Paper Details

Date Published: 15 January 2007
PDF: 8 pages
Proc. SPIE 6403, Laser-Induced Damage in Optical Materials: 2006, 640312 (15 January 2007); doi: 10.1117/12.692590
Show Author Affiliations
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)
Sumei Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Zicai Shen, Shanghai Institute of Optics and Fine Mechanics (China)
Xiaoyong Fu, Shanghai Institute of Optics and Fine Mechanics (China)
Hongbo He, Shanghai Institute of Optics and Fine Mechanics (China)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 6403:
Laser-Induced Damage in Optical Materials: 2006
Gregory J. Exarhos; Arthur H. Guenther; Keith L. Lewis; Detlev Ristau; M. J. Soileau; Christopher J. Stolz, Editor(s)

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