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Proceedings Paper

The optical design for microlithographic lenses
Author(s): Yasuhiro Ohmura
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Paper Abstract

The evolution of the microlithographic lens is described based on an analysis of main features of the lenses in each generation. Even current lenses, comprising more than 20 elements, can be understandable through the analysis.

Paper Details

Date Published: 18 July 2006
PDF: 10 pages
Proc. SPIE 6342, International Optical Design Conference 2006, 63421T (18 July 2006); doi: 10.1117/12.692315
Show Author Affiliations
Yasuhiro Ohmura, Nikon Corp. (Japan)

Published in SPIE Proceedings Vol. 6342:
International Optical Design Conference 2006
G. Groot Gregory; Joseph M. Howard; R. John Koshel, Editor(s)

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