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Proceedings Paper

A low-noise durable transmissive stamper for multi-layer discs using phase transition mastering
Author(s): Yukari Aoki; Kuniyuki Morita; Kyosuke Deguchi; Toshimori Miyakoshi; Yasuyuki Miyaoka; Tomoyuki Hiroki; Osamu Koyama
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Paper Abstract

We developed a negative-type photoresist of WOx film and obtained a low noise groove. We also confirmed a feasibility of the transmissive stamper using the WOx film for multi-layer discs.

Paper Details

Date Published: 22 June 2006
PDF: 10 pages
Proc. SPIE 6282, Optical Data Storage 2006, 62821L (22 June 2006); doi: 10.1117/12.692308
Show Author Affiliations
Yukari Aoki, Canon Inc. (Japan)
Kuniyuki Morita, Canon Inc. (Japan)
Kyosuke Deguchi, Canon Inc. (Japan)
Toshimori Miyakoshi, Canon Inc. (Japan)
Yasuyuki Miyaoka, Canon Inc. (Japan)
Tomoyuki Hiroki, Canon Inc. (Japan)
Osamu Koyama, Canon Inc. (Japan)


Published in SPIE Proceedings Vol. 6282:
Optical Data Storage 2006
Ryuichi Katayama; Tuviah E. Schlesinger, Editor(s)

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