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Proceedings Paper

Maximum likelihood estimation as a general method of combining subaperture data for interferometric testing
Author(s): Peng Su; Jim Burge; Robert A. Sprowl; Jose Sasian
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Paper Abstract

Interferometers accurately measure the difference between two wavefronts, one from a reference surface and the other from an unknown surface. If the reference surface is near-perfect or is accurately known from some other test, then the shape of the unknown surface can be determined. We investigate the case where neither the reference surface nor the surface under test is known. By making multiple modulated measurements where both surfaces are translated and rotated, we obtain sufficient information to reconstruct the figure of both surfaces. We have developed software that provides a maximum likelihood estimation of both surfaces, as well as an assessment of the quality of the reconstruction. This was demonstrated for the measurement of a large flat mirror, using a smaller reference mirror that has significant shape errors.

Paper Details

Date Published: 12 July 2006
PDF: 6 pages
Proc. SPIE 6342, International Optical Design Conference 2006, 63421X (12 July 2006); doi: 10.1117/12.692233
Show Author Affiliations
Peng Su, College of Optical Sciences, Univ. of Arizona (United States)
Jim Burge, College of Optical Sciences, Univ. of Arizona (United States)
Robert A. Sprowl, College of Optical Sciences, Univ. of Arizona (United States)
Jose Sasian, College of Optical Sciences, Univ. of Arizona (United States)

Published in SPIE Proceedings Vol. 6342:
International Optical Design Conference 2006
G. Groot Gregory; Joseph M. Howard; R. John Koshel, Editor(s)

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