Share Email Print

Proceedings Paper

Holographic nanolithography techniques for the fabrication of microcavity arrays
Author(s): Jeonghoi Kim; Changsu Kim; Haewook Han
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Two-dimensional (2D) photonic quasicrystals (PQCs) were fabricated by a holographic nanolithography technique. Using two laser beams with different angles incident on the sample, microcavities with 2D internal nanostructures are patterned with a few micrometer periods.

Paper Details

Date Published: 6 October 2006
PDF: 4 pages
Proc. SPIE 6352, Optoelectronic Materials and Devices, 63523T (6 October 2006); doi: 10.1117/12.691633
Show Author Affiliations
Jeonghoi Kim, Pohang Univ. of Science and Technology (South Korea)
Changsu Kim, LG-Philips LCD (South Korea)
Haewook Han, Pohang Univ. of Science and Technology (South Korea)

Published in SPIE Proceedings Vol. 6352:
Optoelectronic Materials and Devices
Yong Hee Lee; Fumio Koyama; Yi Luo, Editor(s)

© SPIE. Terms of Use
Back to Top