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Proceedings Paper

Segmented MEMS deformable-mirror for wavefront correction
Author(s): Michael A. Helmbrecht; Min He; Thor Juneau; Matthew Hart; Nathan Doble
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Paper Abstract

Advances in microelectromechanical systems (MEMS) technology are enabling the design and fabrication of new class of deformable mirrors (DM) for adaptive optics (AO). This paper presents a MEMS DM design that is suitable for a large range of applications. More than 7.5 μm of stroke has been demonstrated for this DM with 125 V drive. Other minor design variations have shown 1.63 μm step responses of 120 μs and 140 μs rise and fall times with only a 36 V drive. The DMs have excellent optical quality of 6-20 nm rms that varies with temperature only 0.56 nm/°C peak-to-valley.

Paper Details

Date Published: 17 October 2006
PDF: 9 pages
Proc. SPIE 6376, Optomechatronic Micro/Nano Devices and Components II, 63760D (17 October 2006); doi: 10.1117/12.690809
Show Author Affiliations
Michael A. Helmbrecht, Iris AO, Inc. (United States)
Min He, Iris AO, Inc. (United States)
Thor Juneau, SiTime, Inc. (United States)
Matthew Hart, Owlstone Ltd. (United Kingdom)
Nathan Doble, Iris AO, Inc. (United States)


Published in SPIE Proceedings Vol. 6376:
Optomechatronic Micro/Nano Devices and Components II
Yoshitada Katagiri, Editor(s)

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