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Proceedings Paper

Tunable micro-electromechanical grating in silicon
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Paper Abstract

In this paper, we propose a solution for simple, fast and easily controllable way of tuning silicon gratings using Micro Electro Mechanical Systems (MEMS) to deform the grating itself. Basically the idea is to deform mechanically a silicon grating using electrostatic actuators, enabling pitch tuning over a large proportion (more than 50% is easily achievable with our approach). Moreover we can change the spacing of individual layers within the grating. A theoretical analysis and numerical simulations are presented and a first prototype is fabricated. Bragg gratings, springs and actuators are realized by silicon micro/nano machining on a silicon platform enabling full integration and passive alignment of all optical components. Applications range from ultra-sensitive displacement sensors, to telecommunications and biology.

Paper Details

Date Published: 18 October 2006
PDF: 9 pages
Proc. SPIE 6376, Optomechatronic Micro/Nano Devices and Components II, 637604 (18 October 2006); doi: 10.1117/12.690773
Show Author Affiliations
Yves-Alain Peter, École Polytechnique de Montréal (Canada)
Fatou Binetou Koné, École Polytechnique de Montréal (Canada)
Jonathan Masson, École Polytechnique de Montréal (Canada)
Nicolas Godbout, École Polytechnique de Montréal (Canada)


Published in SPIE Proceedings Vol. 6376:
Optomechatronic Micro/Nano Devices and Components II
Yoshitada Katagiri, Editor(s)

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