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Proceedings Paper

PMN-PT piezoelectric near field optical probe for data storage
Author(s): Yong K. Hong; Sung Q Lee; Eun Kyoung Kim; Kang Ho Park; Kee S. Moon
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Paper Abstract

This paper presents the fabrication process of a novel aperture which allows near field optical data storage. We use PMN-PT ((1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3) single crystal material - a new generation oxide material known as relaxor ferroelectrics that exhibits extraordinary piezoelectric properties - to fabricate microlenes using photolithography and dry etching techniques. In this paper, we describe the fabrication processes of a PMN-PT single crystal material microlens prototype with a miniature aperture for near field optical data storage. PMN-PT has the merits of transparency for optical usage and also has a high dielectric coefficient that is suitable for actuator and sensor applications. It provides an advantage of manufacturing both aperture and actuator/sensor with the same material. The thermal reflow technique is used to fabricate photoresist microlenses on a freestanding single crystal PMN-PT film as a mask. The PMN-PT lenses are fabricated by a chemically assisted ion beam etching (CAIBE) technique. Finally the focused ion beam (FIB) machining process is used to place a miniature aperture at the apex of the microlens. We were able to successfully fabricate the 10μm PMN-PT microlenses with less than 100nm apertures. From the experimental measurement, we were able to obtain the optical throughput of 1.83x10-7 from a 50nm aperture.

Paper Details

Date Published: 19 October 2006
PDF: 6 pages
Proc. SPIE 6374, Optomechatronic Actuators, Manipulation, and Systems Control, 63740A (19 October 2006); doi: 10.1117/12.689527
Show Author Affiliations
Yong K. Hong, San Diego State Univ. (United States)
Sung Q Lee, Electronics and Telecommunications Research Institute (South Korea)
Eun Kyoung Kim, Electronics and Telecommunications Research Institute (South Korea)
Kang Ho Park, Electronics and Telecommunications Research Institute (South Korea)
Kee S. Moon, San Diego State Univ. (United States)


Published in SPIE Proceedings Vol. 6374:
Optomechatronic Actuators, Manipulation, and Systems Control
Farrokh Janabi-Sharifi; Yukitoshi Otani, Editor(s)

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