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Proceedings Paper

Influence of etching slope on two-dimensional photonic crystal slab resonators
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Paper Abstract

The influence of etching slope on cavity Q-factors in two-dimensional (2D) photonic crystal (PhC) slab is studied. Through FDTD simulation, it is confirmed that the Q-factor decreases with etching slope. The main loss comes from the horizontal coupling into propagating TM-modes. We designed three-lattice-long modified linear cavities having high Q-factors. However, the measured Q-factor was about 250. This small Q-factor is attributed to the non-vertical (13°) side wall.

Paper Details

Date Published: 5 October 2006
PDF: 9 pages
Proc. SPIE 6352, Optoelectronic Materials and Devices, 63520P (5 October 2006); doi: 10.1117/12.688885
Show Author Affiliations
Myung-Ki Kim, Korea Advanced Institute of Science and Technology (South Korea)
In-Kag Hwang, Chonnam National Univ. (South Korea)
Jin-Kyu Yang, Korea Advanced Institute of Science and Technology (South Korea)
Yong-Hee Lee, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 6352:
Optoelectronic Materials and Devices
Yong Hee Lee; Fumio Koyama; Yi Luo, Editor(s)

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