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Proceedings Paper

Holographic technique of generating large-size mask with hexagonal pattern for photonic crystal LED fabrication
Author(s): Ying Liu; Xiangsu Zhang; Shou Liu
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Paper Abstract

A simple optical system for generating large-size hexagonal lattice used as the mask for photonic crystal LED fabrication is proposed. The key element in the system is a holographic diffractive optical element consisting of three phase gratings made with holographic means. Under the illumination of a single plane wave, three plane waves can be generated and interfere to form a uniform hexagonal pattern. Theoretical analysis demonstrates that equal intensity of the three plane waves can be obtained if groove depth of the gratings is about 400 nm, which can be achieved by controlling the development time in grating processing. Mask on LED with lattice area up to 15 cm2 has been obtained with the method.

Paper Details

Date Published: 21 September 2006
PDF: 8 pages
Proc. SPIE 6355, Advanced LEDs for Solid State Lighting, 63550X (21 September 2006); doi: 10.1117/12.687899
Show Author Affiliations
Ying Liu, Xiamen Univ. (China)
Xiangsu Zhang, Xiamen Univ. (China)
Shou Liu, Xiamen Univ. (China)

Published in SPIE Proceedings Vol. 6355:
Advanced LEDs for Solid State Lighting
Chang-Hee Hong; Tsunemasa Taguchi; Jung Han; Lianghui Chen, Editor(s)

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