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Proceedings Paper

Assembly of micro-optical systems with mechanical positioning
Author(s): Andrew Stockham; Jay A. Hammer; John G. Smith; Luis M. Nelson
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Paper Abstract

Aligning of multiple micro-optical components is required for many systems composed of arrays of multiple lens elements, apertures, and filters. Methods of aligning two such wafers using mechanical features are discussed here. Alignment features include binary holes and posts, or grooves and ridges. With the circular holes or rectangular grooves etched into the two wafers, the mating pins or ridges are formed on both sides of a separate element to set both the lateral and vertical positioning. Grayscale technology allows for the printing of V-grooves and V-cones onto any substrate material over a wide range of aspect ratios. When integrated with cylindrical (fiber) or spherical (ball lens) mechanical features, this allows for accurate positioning. Some techniques allow for repositioning as well as disassembly and reassembly. The designs are kinematic or nearly kinematic. The paper discusses tolerances on mating components, and the associated precision of the overall alignment.

Paper Details

Date Published: 13 October 2006
PDF: 10 pages
Proc. SPIE 6376, Optomechatronic Micro/Nano Devices and Components II, 637609 (13 October 2006); doi: 10.1117/12.687208
Show Author Affiliations
Andrew Stockham, MEMS Optical, Inc. (United States)
Jay A. Hammer, MEMS Optical, Inc. (United States)
John G. Smith, MEMS Optical, Inc. (United States)
Luis M. Nelson, MEMS Optical, Inc. (United States)

Published in SPIE Proceedings Vol. 6376:
Optomechatronic Micro/Nano Devices and Components II
Yoshitada Katagiri, Editor(s)

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