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Proceedings Paper

Micro optomechanical devices for medical endoscope applications
Author(s): Muneki Nakada; Changho Chong; Keiji Isamoto; Hiroyuki Fujita; Hiroshi Toshiyoshi
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Paper Abstract

We propose an all-optical fiberscopic endoscope for medical diagnosis by using a MEMS optical scanner with the wavelength-division multiplex approach. An infrared light of 1.3 microns was used for medical inspection through the endoscope fiber, and it was scanned over the tissue of interest by using a MEMS scanning mirror. The mirror was electrostatically operated not by using external voltage line but by co-located photovoltaic cell, which generated operation voltage from another input light of 1.5-micron-wavelength. The entire sensor head (fiber, beam splitter, photovoltaic cell, and MEMS chip) was encapsulated in a Pyrex glass tube of 5 mrn outer diameter. Drive voltage of 5 V was obtained by the optical modulation, and the MEMS scanner chip operated at 300 Hz resonance for optical scan angle of 10 degrees. In this paper, we present the MEMS device structure, optical system, and preliminary imaging of human skin tissue by the optical coherent tomography.

Paper Details

Date Published: 13 October 2006
PDF: 8 pages
Proc. SPIE 6376, Optomechatronic Micro/Nano Devices and Components II, 637607 (13 October 2006); doi: 10.1117/12.687115
Show Author Affiliations
Muneki Nakada, The Univ. of Tokyo (Japan)
Kanagawa Academy of Science and Technology (Japan)
Changho Chong, Santec Corp. (Japan)
Keiji Isamoto, Santec Corp. (Japan)
Hiroyuki Fujita, Santec Corp. (Japan)
Hiroshi Toshiyoshi, The Univ. of Tokyo (Japan)
Kanagawa Academy of Science and Technology (Japan)


Published in SPIE Proceedings Vol. 6376:
Optomechatronic Micro/Nano Devices and Components II
Yoshitada Katagiri, Editor(s)

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