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Proceedings Paper

Automated manufacturing of micro-lens imprint templates
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Paper Details

Date Published:
Proc. SPIE 6349, Photomask Technology 2006, ; doi: 10.1117/12.687035
Show Author Affiliations
John G. Maltabes, Photronics, Inc. (United States)
Kosta S. Selinidis, Photronics, Inc. (United States)
Gerard Schmid, Molecular Imprints, Inc. (United States)

Published in SPIE Proceedings Vol. 6349:
Photomask Technology 2006
Patrick M. Martin; Robert J. Naber, Editor(s)

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