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Proceedings Paper

Simultaneous measurement of nanometric longitudinal displacement and micrometric lateral displacement by using one line CCD camera
Author(s): Masaaki Adachi; Yasuto Nishide
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Paper Abstract

This paper proposes a simultaneous measurement technique of 2 displacement components by using a laser beam and one high-speed line CCD camera. The laser beam is divided to two beams. One beam is refl ected by a corner refl ector attached on an object and the refl ected beam is superimposed with the other beam. The superimposed beam is expanded by a microscope objective lens and then passed through both a wedge-shape birefringent plate and a polarizer making a fringe pattern. This pattern has a light intensity distribution like a sinusoidal shape whose envelope curve has one peak. The pattern is captured by the line CCD camera and is used to extract nanometric longitudinal displacement and micrometric lateral displacement measurement.

Paper Details

Date Published: 19 October 2006
PDF: 9 pages
Proc. SPIE 6374, Optomechatronic Actuators, Manipulation, and Systems Control, 637408 (19 October 2006); doi: 10.1117/12.686633
Show Author Affiliations
Masaaki Adachi, Kanazawa Univ. (Japan)
Yasuto Nishide, Kanazawa Univ. (Japan)


Published in SPIE Proceedings Vol. 6374:
Optomechatronic Actuators, Manipulation, and Systems Control
Farrokh Janabi-Sharifi; Yukitoshi Otani, Editor(s)

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