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Proceedings Paper

All optically driven MEMS deformable device via a photodetector array
Author(s): Jed Khoury; Kenneth Vaccaro; Charles L. Woods; Bahareh Haji-saeed; Sandip K. Sengupta; Craig Armiento; William D. Goodhue; John Kierstead; Andrew Davis; William Clark
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Paper Abstract

In this paper we demonstrate the first optical actuation of a single-pixel, deformable-mirror MEMS device through a direct cascade with a photodetector. Photovoltaic, p-i-n, and avalanche photodetectors were successfully utilized. Mirror deformations were monitored by interferometry. Deformation is quasilinear at low light intensities, and saturates at higher intensities. Actuation at picowatt light intensities has been accomplished by cascading with an avalanche photodetector. We also describe the fabrication of an integrated device consisting of an all optically addressed deformable-mirror MEMS suspended over a p-i-n photodetector. Initial demonstration of optical actuation of the deformable mirror using the newly integrated device is also presented.

Paper Details

Date Published: 12 October 2006
PDF: 8 pages
Proc. SPIE 6368, Optoelectronic Devices: Physics, Fabrication, and Application III, 636804 (12 October 2006); doi: 10.1117/12.686272
Show Author Affiliations
Jed Khoury, Air Force Research Lab. (United States)
Kenneth Vaccaro, Air Force Research Lab. (United States)
Charles L. Woods, Air Force Research Lab. (United States)
Bahareh Haji-saeed, Univ. of Massachusetts, Lowell (United States)
Sandip K. Sengupta, Univ. of Massachusetts, Lowell (United States)
Solid State Scientific Corp. (United States)
Craig Armiento, Univ. of Massachusetts, Lowell (United States)
William D. Goodhue, Univ. of Massachusetts, Lowell (United States)
John Kierstead, Solid State Scientific Corp. (United States)
Andrew Davis, Solid State Scientific Corp. (United States)
William Clark, Anteon Corp. (United States)


Published in SPIE Proceedings Vol. 6368:
Optoelectronic Devices: Physics, Fabrication, and Application III
Joachim Piprek; Jian Jim Wang, Editor(s)

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