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Proceedings Paper

A novel capacitive type miniature microphone with a flexure hinge diaphragm
Author(s): Hye Jin Kim; Sung Q. Lee; Kang Ho Park
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Paper Abstract

This paper presents a novel, highly sensitive condenser microphone with a flexure hinge diaphragm. We used the finiteelement analysis (FEA) to evaluate the mechanical and acoustic performance of the condenser microphone with a hinge diaphragm. And we fabricated the miniature condenser microphones with area of 1.5 mm x 1.5 mm. From the simulation and measurement results, we confirmed that the maximum displacements at the center of flexure hinge diaphragms are several hundred times, compared with flat diaphragms. Moreover, the miniature microphones have obtained -3 dB bandwidth of nearly 20 kHz by proper design of the flexure hinge diaphragms.

Paper Details

Date Published: 19 October 2006
PDF: 8 pages
Proc. SPIE 6374, Optomechatronic Actuators, Manipulation, and Systems Control, 63740H (19 October 2006); doi: 10.1117/12.686008
Show Author Affiliations
Hye Jin Kim, Electronics and Telecommunications Research Institute (South Korea)
Sung Q. Lee, Electronics and Telecommunications Research Institute (South Korea)
Kang Ho Park, Electronics and Telecommunications Research Institute (South Korea)


Published in SPIE Proceedings Vol. 6374:
Optomechatronic Actuators, Manipulation, and Systems Control
Farrokh Janabi-Sharifi; Yukitoshi Otani, Editor(s)

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