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Proceedings Paper

MEMS acoustic sensor using PMN-PT single-crystal diaphragm
Author(s): Sung Q Lee; Hae Jin Kim; Kang Ho Park; Yong K. Hong; Kee S. Moon
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Paper Abstract

The MEMS (micro-electro-mechanical systems) microphone enables the manufacturing of small mechanical components on the surface of a silicon wafer. The MEMS microphones are less susceptible to vibration because of the smaller diaphragm mass and an excellent candidate for chip-scale packaging. The PMN-PT materials itself exhibit extremely high piezoelectric coefficients and other desirable properties for an acoustic sensor. In this paper, we present a piezoelectric MEMS microphone based on PMN-PT single crystal diaphragm. The fabrication process including dry etching conditions and scale-factored prototype is presented. In particular, this paper introduces the design of a PMN-PT single crystal diaphragm with interdigitated electrode.

Paper Details

Date Published: 19 October 2006
PDF: 10 pages
Proc. SPIE 6374, Optomechatronic Actuators, Manipulation, and Systems Control, 637409 (19 October 2006); doi: 10.1117/12.686007
Show Author Affiliations
Sung Q Lee, Electronics and Telecommunications Research Institute (South Korea)
Hae Jin Kim, Electronics and Telecommunications Research Institute (South Korea)
Kang Ho Park, Electronics and Telecommunications Research Institute (South Korea)
Yong K. Hong, San Diego State Univ. (United States)
Kee S. Moon, San Diego State Univ. (United States)


Published in SPIE Proceedings Vol. 6374:
Optomechatronic Actuators, Manipulation, and Systems Control
Farrokh Janabi-Sharifi; Yukitoshi Otani, Editor(s)

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