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Proceedings Paper

Incoming database verification and management for mask data preparation
Author(s): Frank F. Chen; Casper W. Lee; Jason C. Lin
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Paper Abstract

We have developed a database verification and management system to ensure incoming database accuracy before mask data prep (MDP) and optimize computing resource. The system includes incoming database pre-check (IDPCS), backup/restore management functions and CPU resource management, which is queue manager system (QM). To ensure database accuracy through pre-check function can reduce data confirmation time and prevent data prep re-work if using un-excepting database. CPU resource management function has the possibility to optimize computing resource. Backup/Restore function presents automatic archive concept for data management.

Paper Details

Date Published: 20 October 2006
PDF: 8 pages
Proc. SPIE 6349, Photomask Technology 2006, 63493U (20 October 2006); doi: 10.1117/12.685916
Show Author Affiliations
Frank F. Chen, Toppan Chunghwa Electronics Corp. (Taiwan)
Casper W. Lee, Toppan Chunghwa Electronics Corp. (Taiwan)
Jason C. Lin, Toppan Chunghwa Electronics Corp. (Taiwan)


Published in SPIE Proceedings Vol. 6349:
Photomask Technology 2006
Patrick M. Martin; Robert J. Naber, Editor(s)

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