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Proceedings Paper

Composite microstructures for optical data storage
Author(s): Xuegong Deng; Xiaoming Liu; Paul Sciortino, Jr.; Jian J. Wang; Anguel Nikolov; Feng Liu; Lei Chen; Sebastian Fiorillo; Nada O'Brien
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Paper Abstract

We design and fabricate polarization-dependent components (PDCs) based on all-dielectric, fully planarized, multilayer microstructures of 150 nm period by using low-loss materials. Quarter-wave and half-wave phase plates at 405 nm are presented. Wafer-level retardation within +/-7deg of the targets and wavefront distortion at 10mm-aperture <20mλ rms are achieved. We also discussed the reliability of various composite microstructures. Stress-test up to 2000 hours at 85°C and 85% relative humidity confirmed that even air-channeled microstructures surpass very stringent reliability requirements. Multifunction integrated diffractive PDCs are discussed.

Paper Details

Date Published: 22 June 2006
PDF: 8 pages
Proc. SPIE 6282, Optical Data Storage 2006, 628207 (22 June 2006); doi: 10.1117/12.685166
Show Author Affiliations
Xuegong Deng, NanoOpto Corp. (United States)
Xiaoming Liu, NanoOpto Corp. (United States)
Paul Sciortino, Jr., NanoOpto Corp. (United States)
Jian J. Wang, NanoOpto Corp. (United States)
Anguel Nikolov, NanoOpto Corp. (United States)
Feng Liu, NanoOpto Corp. (United States)
Lei Chen, NanoOpto Corp. (United States)
Sebastian Fiorillo, NanoOpto Corp. (United States)
Nada O'Brien, NanoOpto Corp. (United States)


Published in SPIE Proceedings Vol. 6282:
Optical Data Storage 2006
Ryuichi Katayama; Tuviah E. Schlesinger, Editor(s)

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