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Proceedings Paper

Non-destructive structural homogeneity of MOEMS arrays: applications of a through-transmissive-media interferometer on a digital mirror device-spatial light modulator
Author(s): L. M. Heine; P. I. Oden
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Paper Abstract

Interrogation tools are the key to a thorough understanding of any technology. Texas Instruments' DLP(R) Products - Digital Mirror Device is no exception to this rule. We will discuss the application of a non-destructive, through-glass interferometer system toward gaining insight to the degree of structural uniformity of a statistically significant sampling of micro-opto-electromechanical (MOEM) mirrors as used in our product line. In the course of providing this information, instrumentation details such as reliability and reproducibility of measurements obtained on this interferometer will be discussed. Additionally, the importance of this mechanical uniformity to displaying images with this spatial light modulator (SLM) will be discussed as well.

Paper Details

Date Published: 14 August 2006
PDF: 9 pages
Proc. SPIE 6293, Interferometry XIII: Applications, 62930C (14 August 2006); doi: 10.1117/12.684222
Show Author Affiliations
L. M. Heine, Texas Instruments, Inc. (United States)
P. I. Oden, Texas Instruments, Inc. (United States)


Published in SPIE Proceedings Vol. 6293:
Interferometry XIII: Applications
Erik L. Novak; Wolfgang Osten; Christophe Gorecki, Editor(s)

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