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Proceedings Paper

High-speed bistable MEMS commutators
Author(s): E. G. Kostsov; A. A. Kolesnikov
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Paper Abstract

The possibility of creation of high-speed (microsecond range) microcommutators with the two steady states is discussed. Microcommutators are based on the micromotors with the high energy output, that perfoms the electromechanical energy conversion by the electrostatic rolling of the thin metallic film on the surface of the dielectric with the high value of the dielectric permeability. The analysis of the microrelay operation is perfomed, and their main parameters are given. One microcommutator construction is described, with microcommutator manufactured by micromachining.

Paper Details

Date Published: 10 June 2006
PDF: 6 pages
Proc. SPIE 6260, Micro- and Nanoelectronics 2005, 62601K (10 June 2006); doi: 10.1117/12.683498
Show Author Affiliations
E. G. Kostsov, Institute of Automation and Electrometry (Russia)
A. A. Kolesnikov, Institute of Automation and Electrometry (Russia)


Published in SPIE Proceedings Vol. 6260:
Micro- and Nanoelectronics 2005
Kamil A. Valiev; Alexander A. Orlikovsky, Editor(s)

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