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Proceedings Paper

Linear sizes measurements of relief elements with the width less than 100 nm on a SEM
Author(s): Yu. A. Novikov; A. V. Rakov; P. A. Todua
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Paper Abstract

A method has been suggested for measuring the line width of trapezoidal profile relief elements on a scanning electron microscope (SEM) for cases where the electron probe diameter is greater than the measured size. The method has been demonstrated on low voltage SEM. The minimum size that could be measured was 13 nm, which is almost in 2 times smaller than the low voltage SEM electron probe diameter.

Paper Details

Date Published: 10 June 2006
PDF: 6 pages
Proc. SPIE 6260, Micro- and Nanoelectronics 2005, 626015 (10 June 2006); doi: 10.1117/12.683401
Show Author Affiliations
Yu. A. Novikov, General Physics Institute (Russia)
A. V. Rakov, General Physics Institute (Russia)
P. A. Todua, Ctr. for Surface and Vacuum Research (Russia)


Published in SPIE Proceedings Vol. 6260:
Micro- and Nanoelectronics 2005
Kamil A. Valiev; Alexander A. Orlikovsky, Editor(s)

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