Share Email Print
cover

Proceedings Paper

Factors effected on nanoporous anodic alumina ordering
Author(s): S. A. Gavrilov; A. V. Zheleznyakova; A. N. Belov; D. Yu. Barabanov; V. I. Shevyakov; E. V. Vishnikin; A. V. Khlynov
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The influence of the thermal regimes on the formation of ordered porous anodic alumina was investigated. The process of the formation of the high ordered films of porous anodic alumina was developed.

Paper Details

Date Published: 10 June 2006
PDF: 8 pages
Proc. SPIE 6260, Micro- and Nanoelectronics 2005, 626011 (10 June 2006); doi: 10.1117/12.683296
Show Author Affiliations
S. A. Gavrilov, Moscow State Institute of Electronic Technology (Russia)
A. V. Zheleznyakova, Moscow State Institute of Electronic Technology (Russia)
A. N. Belov, Moscow State Institute of Electronic Technology (Russia)
D. Yu. Barabanov, Moscow State Institute of Electronic Technology (Russia)
V. I. Shevyakov, Moscow State Institute of Electronic Technology (Russia)
E. V. Vishnikin, Moscow State Institute of Electronic Technology (Russia)
A. V. Khlynov, Moscow State Institute of Electronic Technology (Russia)


Published in SPIE Proceedings Vol. 6260:
Micro- and Nanoelectronics 2005
Kamil A. Valiev; Alexander A. Orlikovsky, Editor(s)

© SPIE. Terms of Use
Back to Top