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Proceedings Paper

Formation of ordered arrays of Ag nanowires and nanodots on Si(557) surface
Author(s): R. Zhachuk; S. Teys; A. Dolbak; B. Olshanetsky
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Paper Abstract

Formation of ordered arrays of Ag nanowires and nanodots on stepped Si(557) silicon surface have been studied by scanning tunneling microscopy, low energy electron diffraction and Auger electron spectroscopy. It was found that the shape of the Ag islands being formed depends drastically on preliminary exposure of a Si sample in the vacuum chamber. This effect may be caused by the adsorption of small amounts (less than a percent of a monolayer) of oxygen on Si surface from the residual atmosphere in the vacuum chamber. When silver is deposited on a clean Si(557) surface the wide epitaxial silver islands form. After exposure, silver nanostructures can be obtained in the form of nanowires extended along the edges of steps or nanodots ordered in lines parallel to these edges depending on the exposition.

Paper Details

Date Published: 10 June 2006
PDF: 7 pages
Proc. SPIE 6260, Micro- and Nanoelectronics 2005, 62600X (10 June 2006); doi: 10.1117/12.683291
Show Author Affiliations
R. Zhachuk, Institute of Semiconductor Physics (Russia)
S. Teys, Institute of Semiconductor Physics (Russia)
A. Dolbak, Institute of Semiconductor Physics (Russia)
B. Olshanetsky, Institute of Semiconductor Physics (Russia)


Published in SPIE Proceedings Vol. 6260:
Micro- and Nanoelectronics 2005
Kamil A. Valiev; Alexander A. Orlikovsky, Editor(s)

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