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Proceedings Paper

Silicon-on-insulator microphotonic devices
Author(s): Laurent Vivien; Eric Cassan; Delphine Marris-Morini; Sylvain Maine; Mathieu Rouvière; Jean-François Damlencourt; Jean-Marc Fédéli; Anatole Lupu; Daniel Pascal; Xavier Le Roux; Suzanne Laval
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Paper Abstract

SOI microwaveguides and associated devices (splitters, turns,...) are used for light distribution. Rib SOI geometries obtained by shallow etching of the silicon film offer definite advantages for the integration of active devices while fulfilling efficiency and compactness. Propagation losses of such waveguides are one order of magnitude smaller than for single mode strip waveguides. Rib-based compact and low loss optical signal distribution from one input to up to 1024 output points has been demonstrated. Light injection in submicron SOI waveguides is discussed. The indirect bandgap of silicon is not in favor of light emission and modulation. Realization of silicon sources and efficient high speed silicon-based modulators is a real challenge. For light detection, germanium can be grown on silicon and Ge photodetectors with -3dB bandwidths up to 30 GHz have been demonstrated.

Paper Details

Date Published: 18 April 2006
PDF: 14 pages
Proc. SPIE 6182, Photonic Crystal Materials and Devices III (i.e. V), 618203 (18 April 2006); doi: 10.1117/12.683062
Show Author Affiliations
Laurent Vivien, Institut d'Electronique Fondamentale, CNRS, Univ. Paris Sud (France)
Eric Cassan, Institut d'Electronique Fondamentale, CNRS, Univ. Paris Sud (France)
Delphine Marris-Morini, Institut d'Electronique Fondamentale, CNRS, Univ. Paris Sud (France)
Sylvain Maine, Institut d'Electronique Fondamentale, CNRS, Univ. Paris Sud (France)
Mathieu Rouvière, Institut d'Electronique Fondamentale, CNRS, Univ. Paris Sud (France)
STMicroelectronics (France)
Jean-François Damlencourt, CEA-DRT/LETI (France)
Jean-Marc Fédéli, CEA-DRT/LETI (France)
Anatole Lupu, Institut d'Electronique Fondamentale, CNRS, Univ. Paris Sud (France)
Daniel Pascal, Institut d'Electronique Fondamentale, CNRS, Univ. Paris Sud (France)
Xavier Le Roux, Institut d'Electronique Fondamentale, CNRS, Univ. Paris Sud (France)
Suzanne Laval, Institut d'Electronique Fondamentale, CNRS, Univ. Paris Sud (France)


Published in SPIE Proceedings Vol. 6182:
Photonic Crystal Materials and Devices III (i.e. V)
Richard M. De La Rue; Pierre Viktorovitch; Ceferino Lopez; Michele Midrio, Editor(s)

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