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Proceedings Paper

High-resolution x-ray tomography using laboratory sources
Author(s): Andrei Tkachuk; Michael Feser; Hongtao Cui; Fred Duewer; Hauyee Chang; Wenbing Yun
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Paper Abstract

X-ray computed tomography (XCT) is a powerful nondestructive 3D imaging technique, which enables the visualization of the three dimensional structure of complex, optically opaque samples. High resolution XCT using Fresnel zone plate lenses has been confined in the past to synchrotron radiation centers due to the need for a bright and intense source of x-rays. This confinement severely limits the availability and accessibility of x-ray microscopes and the wide proliferation of this methodology. We are describing a sub-50nm resolution XCT system operating at 8 keV in absorption and Zernike phase contrast mode based on a commercially available laboratory x-ray source. The system utilizes high-efficiency Fresnel zone plates with an outermost zone width of 35 nm and 700 nm structure height resulting in a current spatial resolution better than 50 nm. In addition to the technical description of the system and specifications, we present application examples in the semiconductor field.

Paper Details

Date Published: 7 September 2006
PDF: 8 pages
Proc. SPIE 6318, Developments in X-Ray Tomography V, 63181D (7 September 2006); doi: 10.1117/12.682383
Show Author Affiliations
Andrei Tkachuk, Xradia, Inc. (United States)
Michael Feser, Xradia, Inc. (United States)
Hongtao Cui, Xradia, Inc. (United States)
Fred Duewer, Xradia, Inc. (United States)
Hauyee Chang, Xradia, Inc. (United States)
Wenbing Yun, Xradia, Inc. (United States)

Published in SPIE Proceedings Vol. 6318:
Developments in X-Ray Tomography V
Ulrich Bonse, Editor(s)

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