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Proceedings Paper

High-spatial-resolution scanning x-ray fluorescence microscope with Kirkpatrick-Baez mirrors
Author(s): Satoshi Matsuyama; Hidekazu Mimura; Mari Shimura; Hirokatsu Yumoto; Keiko Katagishi; Soichiro Handa; Akihiko Shibatani; Yasuhisa Sano; Kazuya Yamamura; Yoshinori Nishino; Kenji Tamasaku; Makina Yabashi; Tetsuya Ishikawa; Kazuto Yamauchi
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Paper Abstract

We developed a high-spatial-resolution scanning X-ray fluorescence microscope (SXFM) with Kirkpatrick-Baez mirrors. As a result of focusing tests at 15 keV, the focused beam having a FWHM of 30 x 50 nm2 was achieved. Additionally, the size was controllable within the wide range of 30 ~ 1400 nm merely by adjusting the X-ray source size. The observation of a fine test chart suggests that SXFM enables us to visualize the element distribution inside the pattern at a spatial resolution better than 30 nm. We applied the SXFM to observe intracellular elemental distributions at a single-cell level, so that we could acquire element distribution maps with a spatial resolution of sub-100 nm and lower detection limit of 0.01 fg.

Paper Details

Date Published: 29 August 2006
PDF: 10 pages
Proc. SPIE 6317, Advances in X-Ray/EUV Optics, Components, and Applications, 631719 (29 August 2006); doi: 10.1117/12.681964
Show Author Affiliations
Satoshi Matsuyama, Osaka Univ. (Japan)
Hidekazu Mimura, Osaka Univ. (Japan)
Mari Shimura, International Medical Ctr. of Japan (Japan)
Hirokatsu Yumoto, Osaka Univ. (Japan)
Keiko Katagishi, Osaka Univ. (Japan)
Soichiro Handa, Osaka Univ. (Japan)
Akihiko Shibatani, Osaka Univ. (Japan)
Yasuhisa Sano, Osaka Univ. (Japan)
Kazuya Yamamura, Osaka Univ. (Japan)
Yoshinori Nishino, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
Kenji Tamasaku, SPring-8/RIKEN (Japan)
Makina Yabashi, SPring-8/RIKEN (Japan)
Tetsuya Ishikawa, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
SPring-8/RIKEN (Japan)
Kazuto Yamauchi, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 6317:
Advances in X-Ray/EUV Optics, Components, and Applications
Ali M. Khounsary; Christian Morawe, Editor(s)

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