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Proceedings Paper

At-wavelength figure metrology of total reflection mirrors in hard x-ray region
Author(s): Hirokatsu Yumoto; Hidekazu Mimura; Satoshi Matsuyama; Soichiro Handa; Akihiko Shibatani; Keiko Katagishi; Yasuhisa Sano; Makina Yabashi; Yoshinori Nishino; Kenji Tamasaku; Tetsuya Ishikawa; Kazuto Yamauchi
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Paper Abstract

We realized nearly diffraction-limited performance with a FWHM focal spot size of 25 nm at an x-ray energy of 15 keV at SPring-8. We explain performances of fabricated x-ray mirror, its fabrication technologies and future plan for realizing sub-10-nm focusing. We developed a novel method of at-wavelength metrology for evaluating the focusing hard x-ray beam in a grazing-incidence optical system. The metrology is based on the numerical retrieval method using the intensity distribution profile around the focal point. We demonstrated the at-wavelength metrology and estimated the surface figure error on a test mirror. An experiment for measuring the focusing intensity profile was performed at the 1-km-long beamline (BL29XUL) of SPring-8. The obtained results were compared with the profile measured by the optical interferometer and confirmed to be in good agreement with it. This technique has potential for characterizing wave-front aberration on elliptical mirrors for the sub-10-nm focusing.

Paper Details

Date Published: 29 August 2006
PDF: 12 pages
Proc. SPIE 6317, Advances in X-Ray/EUV Optics, Components, and Applications, 631709 (29 August 2006); doi: 10.1117/12.681587
Show Author Affiliations
Hirokatsu Yumoto, Osaka Univ. (Japan)
Hidekazu Mimura, Osaka Univ. (Japan)
Satoshi Matsuyama, Osaka Univ. (Japan)
Soichiro Handa, Osaka Univ. (Japan)
Akihiko Shibatani, Osaka Univ. (Japan)
Keiko Katagishi, Osaka Univ. (Japan)
Yasuhisa Sano, Osaka Univ. (Japan)
Makina Yabashi, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
Yoshinori Nishino, SPring-8/RIKEN (Japan)
Kenji Tamasaku, SPring-8/RIKEN (Japan)
Tetsuya Ishikawa, SPring-8/Japan Synchrotron Radiation Research Institute (Japan)
SPring-8/RIKEN (Japan)
Kazuto Yamauchi, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 6317:
Advances in X-Ray/EUV Optics, Components, and Applications
Ali M. Khounsary; Christian Morawe, Editor(s)

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