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Proceedings Paper

Nanometric displacement measurement using phase singularities in Laguerre-Gauss transform of speckle pattern
Author(s): Wei Wang; Tomoaki Yokozeki; Reika Ishijima; Steen G. Hanson; Mitsuo Takeda
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Paper Abstract

Contrary to the common belief of optical metrology, where the phase singularities are considered as obstacles in phase unwrapping, we propose a new technique that makes use of phase singularities in the complex signal representation of a speckle pattern as indicators of local speckle displacements. The complex signal representation is generated by Laguerre-Gauss filtering the dynamic speckle patterns. Experimental results are presented that demonstrate the validity and the performance of the proposed optical vortex metrology for lateral speckle displacement measurement with a large dynamic range.

Paper Details

Date Published: 14 August 2006
PDF: 8 pages
Proc. SPIE 6292, Interferometry XIII: Techniques and Analysis, 62920X (14 August 2006); doi: 10.1117/12.681307
Show Author Affiliations
Wei Wang, The Univ. of Electro-Communications (Japan)
Tomoaki Yokozeki, The Univ. of Electro-Communications (Japan)
Reika Ishijima, The Univ. of Electro-Communications (Japan)
Steen G. Hanson, Risoe National Lab. (Denmark)
Mitsuo Takeda, The Univ. of Electro-Communications (Japan)


Published in SPIE Proceedings Vol. 6292:
Interferometry XIII: Techniques and Analysis
Katherine Creath; Joanna Schmit, Editor(s)

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