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Proceedings Paper

Microlens fabrication using HEBS glass for compact high-resolution IR imaging system
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Paper Abstract

Under the DARPA COMP-I (Compressive Optical MONTAGE Photography Initiative) program, the goal of this project is to significantly reduce the volume and form factor of infrared imaging systems without loss of resolution. The approach taken is to use an array of small lenses with extremely short focal lengths rather than the conventional approach of a single aperture lens system with large diameter and focal length. The array of lenses creates multiple copies of the scene on a single focal plane detector array, which are then used to reconstruct an image with resolution comparable to or higher than that of the conventional imaging system. This is achieved by a computational method known as super-resolution reconstruction. Work at the University of Delaware towards this end includes participation in the design and optimization of the optical system along with fabrication of some of the optical elements. Grayscale lithography using a high-energy beam sensitive (HEBS) glass photomask and proportional dry etch pattern transfer are the key techniques enabling the fabrication process. In this paper we will discuss the design of the imaging system while focusing on the fabrication aspects of the project.

Paper Details

Date Published: 31 August 2006
PDF: 9 pages
Proc. SPIE 6327, Nanoengineering: Fabrication, Properties, Optics, and Devices III, 63270B (31 August 2006); doi: 10.1117/12.681222
Show Author Affiliations
Thomas Dillon, Univ. of Delaware (United States)
Elton Marchena, Univ. of Delaware (United States)
Caihua Chen, Univ. of Delaware (United States)
David Brady, Duke Univ. (United States)
Dennis Prather, Univ. of Delaware (United States)

Published in SPIE Proceedings Vol. 6327:
Nanoengineering: Fabrication, Properties, Optics, and Devices III
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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