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Proceedings Paper

Transmission ellipsometry of transparent-film transparent-substrate systems: polynomial inversion for the substrate optical constant
Author(s): M. Elshazly-Zaghloul; Y. A. Zaghloul; A. R. M. Zaghloul
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Paper Abstract

A polynomial inversion for the substrate optical constant of a transparent-film transparent-substrate system is analytically derived and presented. The reader is spared the derivation procedure which includes involved numerous transformations and algebraic manipulations. Also, closed-form formulae are given to calculate the film thickness of the system. The closed-form formulae are algebraically accurate and introduce no errors. A study of the effects of the experimental random and systematic errors of modern-day ellipsometers is presented which proves the very high accuracy of the method. The method does not need a guessed starting solution and it always provides the correct answer with no divergence. Those are important advantages over the widely used, manufacturer supplied, fitting routines.

Paper Details

Date Published: 28 August 2006
PDF: 10 pages
Proc. SPIE 6286, Advances in Thin-Film Coatings for Optical Applications III, 62860G (28 August 2006); doi: 10.1117/12.681006
Show Author Affiliations
M. Elshazly-Zaghloul, Georgia Institute of Technology (United States)
ITR Technologies, Inc. (United States)
Y. A. Zaghloul, Georgia Institute of Technology (United States)
ITR Technologies, Inc. (United States)
A. R. M. Zaghloul, Georgia Institute of Technology (United States)
ITR Technologies, Inc. (United States)


Published in SPIE Proceedings Vol. 6286:
Advances in Thin-Film Coatings for Optical Applications III
Michael J. Ellison, Editor(s)

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