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Proceedings Paper

Full-field and scanning microtomography based on parabolic refractive x-ray lenses
Author(s): C. G. Schroer; M. Kuhlmann; T. F. Günzler; B. Benner; O. Kurapova; J. Patommel; B. Lengeler; S. V. Roth; R. Gehrke; A. Snigirev; I. Snigireva; N. Stribeck; A. Almendarez-Camarillo; F. Beckmann
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Paper Abstract

Hard x-ray full field and scanning microscopy both greatly benefit from recent advances in x-ray optics. In full field microscopy, for instance, rotationally parabolic refractive x-ray lenses can be used as objective lens in a hard x-ray microscope, magnifying an object onto a detector free of distortion. Using beryllium as lens material, a hard x-ray optical resolution of about 100 nm has been obtained in a field of view of more than 500 micrometers. Further improvement of the spatial resolution to below 50 nm is expected. By reconstructing the sample from a series of micrographs recorded from different perspectives, tomographic imaging with a resolution well below one micrometer was achieved. The technique is demonstrated using a microchip as test sample. In scanning microscopy and tomography, the sample is scanned through a hard x-ray microbeam. Different hard x-ray analytical techniques can be exploited as contrast mechanism, such as x-ray fluorescence, absorption, or scattering. In tomographic scanning mode, they yield for example local elemental, chemical, or structural information from inside a specimen. At synchrotron radiation sources, a small and intensive microbeam can be generated by imaging the source onto the sample position in a strongly reducing geometry, e.g., by parabolic refractive x-ray lenses. With nanofocusing refractive x-ray lenses, a lateral beam size of 50 nm was reached. As an example for scanning tomography, we consider tomographic small angle x-ray scattering (SAXS-tomography), reconstructing a series of SAXS patterns related to small volume elements inside a polymer rod made by injection moulding.

Paper Details

Date Published: 7 September 2006
PDF: 9 pages
Proc. SPIE 6318, Developments in X-Ray Tomography V, 63181H (7 September 2006); doi: 10.1117/12.680989
Show Author Affiliations
C. G. Schroer, Dresden Univ. of Technology (Germany)
M. Kuhlmann, HASYLAB, DESY (Germany)
T. F. Günzler, Aachen Univ. (Germany)
B. Benner, Aachen Univ. (Germany)
O. Kurapova, Aachen Univ. (Germany)
J. Patommel, Dresden Univ. of Technology (Germany)
B. Lengeler, Aachen Univ. (Germany)
S. V. Roth, HASYLAB, DESY (Germany)
R. Gehrke, HASYLAB, DESY (Germany)
A. Snigirev, European Synchrotron Radiation Facility (France)
I. Snigireva, European Synchrotron Radiation Facility (France)
N. Stribeck, Hamburg Univ. (Germany)
A. Almendarez-Camarillo, Hamburg Univ. (Germany)
F. Beckmann, GKSS-Research Ctr., DESY (Germany)

Published in SPIE Proceedings Vol. 6318:
Developments in X-Ray Tomography V
Ulrich Bonse, Editor(s)

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