Share Email Print
cover

Proceedings Paper

A hard x-ray KB-FZP microscope for tomography with sub-100-nm resolution
Author(s): C. Rau; V. Crecea; C.-P. Richter; K. M. Peterson; P. R. Jemian; U. Neuhäusler; G. Schneider; X. Yu; P. V. Braun; T.-C. Chiang; I. K. Robinson
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

An instrument for high-resolution imaging and tomography has been built at the APS beamline 34 ID-C, Argonne National Laboratory. In-line phase contrast tomography can be performed with micrometer resolution. For imaging and tomography with resolution better than 100nm a hard X-ray microscope has been integrated to the instrument. It works with a Kirkpatrick-Baez (KB) mirror as condenser and a Fresnel-Zone plate (FZP) as an objective lens. 50 nm-features have been resolved in a Nickel structure operating the microscope at a photon energy of 9keV. Phase objects with negligible absorption contrast have been imaged. Tomography scans were performed on photonic crystals.

Paper Details

Date Published: 7 September 2006
PDF: 6 pages
Proc. SPIE 6318, Developments in X-Ray Tomography V, 63181G (7 September 2006); doi: 10.1117/12.680975
Show Author Affiliations
C. Rau, Univ. of Illinois at Urbana-Champaign (United States)
Purdue Univ. (United States)
National Institute of Standards and Technology (United States)
V. Crecea, Univ. of Illinois at Urbana-Champaign (United States)
C.-P. Richter, Feinberg School of Medicine, Northwestern Univ. (United States)
K. M. Peterson, Univ. of Illinois at Urbana-Champaign (United States)
P. R. Jemian, Univ. of Illinois at Urbana-Champaign (United States)
U. Neuhäusler, Univ. Bielefeld (Germany)
G. Schneider, BESSY GmbH (Germany)
X. Yu, Univ. of Illinois at Urbana-Champaign (United States)
P. V. Braun, Univ. of Illinois at Urbana-Champaign (United States)
T.-C. Chiang, Univ. of Illinois at Urbana-Champaign (United States)
I. K. Robinson, Univ. College London (United Kingdom)


Published in SPIE Proceedings Vol. 6318:
Developments in X-Ray Tomography V
Ulrich Bonse, Editor(s)

© SPIE. Terms of Use
Back to Top