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Proceedings Paper

Static and dynamic measurements of active MEMS by Twyman-Green interferometry: case of AlN-based microactuators
Author(s): C. Gorecki; A. Andrei; M. Jozwik; K. Krupa; K. Dogheche; S. Balandras; L. Hirsinger; P. Delobelle
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Paper Abstract

This study presents static and dynamic characterisation by Twyman Green interferometry of two active MEMS actuators driven by a thin film transducer of aluminium nitride (AlN). Firstly, we report on the testing results of thin film AlN/Si piezoelectric micro-machined ultrasonic transducers. These devices are expected to exhibit sensing capabilities for monitoring fluid property changes. The goal of second case study is the development of reliable AlN driven cantilevers working as actuation elements in Micro-Electro-Mechanical Systems (MEMS).

Paper Details

Date Published: 14 August 2006
PDF: 6 pages
Proc. SPIE 6293, Interferometry XIII: Applications, 629308 (14 August 2006); doi: 10.1117/12.680691
Show Author Affiliations
C. Gorecki, FEMTO-ST, Univ. de Franche-Comté (France)
A. Andrei, FEMTO-ST, Univ. de Franche-Comté (France)
M. Jozwik, FEMTO-ST, Univ. de Franche-Comté (France)
K. Krupa, FEMTO-ST, Univ. de Franche-Comté (France)
K. Dogheche, FEMTO-ST, Univ. de Franche-Comté (France)
S. Balandras, FEMTO-ST, Univ. de Franche-Comté (France)
L. Hirsinger, FEMTO-ST, Univ. de Franche-Comté (France)
P. Delobelle, FEMTO-ST, Univ. de Franche-Comté (France)


Published in SPIE Proceedings Vol. 6293:
Interferometry XIII: Applications
Erik L. Novak; Wolfgang Osten; Christophe Gorecki, Editor(s)

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