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Proceedings Paper

Reproduction of anti-reflection structures by nano casting method
Author(s): Yoshihiko Hirai; Kenji Sogo; Masaki Nakajima; Hiroaki Kawata
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Paper Abstract

Anti-reflection structure having sharpened corn shape is reproduced by nano casting method. Firstly, the master quartz structure is transferred to UV curable resin to fabricate the replicated mold of the master structure using nano casting method. Next, the anti-reflection structure is transferred to PMMA film using the replicated mold by the nano casting method. To avoid the defects at the mold releasing, thin sacrifice layer is coated on the replicated mold. Also, the molecular weight of the PMMA is optimized to improve the yield of the releasing process and transferred pattern shape. Fine anti-reflection structure is fabricated by the proposed process using the nano casting method without damages to the master structure.

Paper Details

Date Published: 31 August 2006
PDF: 8 pages
Proc. SPIE 6327, Nanoengineering: Fabrication, Properties, Optics, and Devices III, 63270Y (31 August 2006); doi: 10.1117/12.680683
Show Author Affiliations
Yoshihiko Hirai, Osaka Prefecture Univ. (Japan)
Kenji Sogo, Osaka Prefecture Univ. (Japan)
Masaki Nakajima, Osaka Prefecture Univ. (Japan)
Hiroaki Kawata, Osaka Prefecture Univ. (Japan)

Published in SPIE Proceedings Vol. 6327:
Nanoengineering: Fabrication, Properties, Optics, and Devices III
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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