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Proceedings Paper

Self-calibration of wavefront testing interferometers by use of diffractive elements
Author(s): Stephan Reichelt; Hans Tiziani; Hans Zappe
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Paper Abstract

Self-calibration techniques in interferometry imply the absolute determination of the interferometer's systematic error without the need for a high-quality, precisely-known calibration standard. By taking separate measurements at different positions and under different orientations, the interferometer's error can be determined in an absolute manner even with non-perfect optical elements. This paper discusses the versatile possibilities of using diffractive optical elements as calibration tools in wavefront testing interferometry.

Paper Details

Date Published: 14 August 2006
PDF: 10 pages
Proc. SPIE 6292, Interferometry XIII: Techniques and Analysis, 629205 (14 August 2006); doi: 10.1117/12.680660
Show Author Affiliations
Stephan Reichelt, Univ. of Freiburg (Germany)
Hans Tiziani, Univ. of Stuttgart (Germany)
Hans Zappe, Univ. of Freiburg (Germany)

Published in SPIE Proceedings Vol. 6292:
Interferometry XIII: Techniques and Analysis
Katherine Creath; Joanna Schmit, Editor(s)

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