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Proceedings Paper

Periodic nanostructures realized with hyper-NA immersion interferometric lithography
Author(s): Alexandre Lagrange; Anne Laure Charley
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Date Published:
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Proc. SPIE 6327, Nanoengineering: Fabrication, Properties, Optics, and Devices III, 63270E; doi: 10.1117/12.680595
Show Author Affiliations
Alexandre Lagrange, Commissariat à l'Energie Atomique (France)
Anne Laure Charley, STMicroelectronics (France)


Published in SPIE Proceedings Vol. 6327:
Nanoengineering: Fabrication, Properties, Optics, and Devices III
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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